A basic ion beam source package consists of an ion beam source and power supply. There are two types of ion beam sources which we currently offer. These are direct current (DC) and radio frequency (RF). Research and development applications usually require DC type while production environments utilize the RF type.
The selection guide to the left can be used to assist in locating the type of source, power supply or source component. We also offer basic etch systems that consist of a source package and a vacuum station. Finally, we offer other common hardware for sources and systems. Please call or email us if you cannot find the item(s) you are looking for.
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