This is a 6 cm x 22 cm radio frequency (RF) discharge type linear ion beam source. It can be mounted to a flange or supported inside a vacuum chamber (internal mount). The source comes with a RF antenna, shroud and discharge chamber. The antenna is water cooled. The shroud is not water cooled. Grid sets are selected based upon application and are sold separately. The source requires a power supply, gas supply and a radio frequency neutralizer (RFN).