item or part number:  06X30RF

description:  6 x 22/30 cm RF Ion Beam Source

our part number:   06X30RF

ion tech part number:  

Grid type
Source Interface
Neutralizer interface
Power supply
Power supply cables
Matching network
Adaptor for power supply
Gas Flow Control
general info
This is a 6 cm x 30 cm radio frequency (RF) discharge type linear ion beam source. It can be mounted to a flange or supported inside a vacuum chamber (internal mount). The source comes with a RF antenna, shroud and discharge chamber. The antenna is water cooled. The shroud is not water cooled. Grid sets are selected based upon application and are sold separately. The source requires a power supply, gas supply and a radio frequency neutralizer (RFN).

   CAD:  drawings 

   MANUAL:  document 

   BROCHURE:  spec sheet 

   INTERFACE KIT:  drawing 

   TECH HELP:  notes 

   RUN DATA:  sheet 

   VIDEO HELP:  videos 

Material: stainless steel, copper, silver plating, quartz, alumina hardware.
Approximate dimensions and weight:

Height: 5.00 inches
Width (or diameter) : 8.00 inches
Length: 17.00 inches
Weight: 8.00 lbs.

Estimated quantity in stock: 1

The exact quantity of inventory items is subject to change.