description: 16 cm grid assembly, 3 grid, graphite
our part number: 504822A
ion tech part number:
This is a 16 cm grid assembly that consists of 3 grids which are collimated. The beam shape is ideal for etching or sputtering applications. The grid material is pyrolytic graphite. The mount hardware is sold separately. This grid set is designed for replacement of a standard Molybdenum grid set in a 16 cm ion beam source. For use in a standard 16 cm ion beam source, special spacing and grid spring tabs are required during assembly and mounting.