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3 cm DC Ion Beam Source6 cm RF Ion Beam Source6 x 22 cm RF Ion Beam Source
3 cm DC Ion Beam Source6 cm RF Ion Beam Source6 x 22 cm RF Ion Beam Source
 
6 x 22/30 cm RF Ion Beam Source8 cm DC Ion Beam Source12 cm RF Ion Beam Source
6 x 22/30 cm RF Ion Beam Source8 cm DC Ion Beam Source12 cm RF Ion Beam Source
 
13 cm DC Ion Beam Source16 cm RF Ion Beam SourceIon beam assisted deposition chamber.  The Techne model includes two access doors and ports for 2 sources.  Stainless chamber includes liners and blank offs.
13 cm DC Ion Beam Source16 cm RF Ion Beam SourceIon beam assisted deposition chamber. The Techne model includes two access doors and ports for 2 sources. Stainless chamber includes liners and blank offs.
 
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