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6x22 or 6x30 cm Linear RF Sources
Our Linear RF sources are useful for in-line applications such as roll-to-roll or web coaters. The 6x30cm source can be equipped with either 6x30cm collimated graphite grids or 6x22cm shaped molybdenum grids. This allows for greater process flexibility with a single ion source. Additionally, the gas, RF antenna cooling water, and DC connections have been placed on the side of the ion source instead of the rear giving the ion source more placement flexibility inside the chamber. We also offer a standard 6x22cm ion source with most of the same benefits, but just uses 6x22cm molybdenum grids. As with all RF ion sources, these can be run with both inert and some reactive gases. With a maximum of 500mA and 1500V, these linear ion sources can handle both high-rate, high-throughput and precision assist or etch operations.
IBEAM Power Supply
Integrating all RF, DC, and RFN power and control into a single 19-inch rack mount unit, the I-Beam 700 series Power Supply was a revolution when it was first released in 2009. The IBEAM 703 is a stand alone unit and has its own RF generator. It is the standard in the field for performance, quality, and backward compatibility. The I-Beam 703 is also capable of meeting the newest system requirements. The beam current possibilities range from 600mA to 1000mA. All of our supplies are equipped with front panel keypads for direct user control with large, easy-to-read LED displays. Three modes allow convenient control access. These are “Manual” providing full RF power control, “Local” allowing direct beam current control, and “Remote” locking the front panel. Communication using RS-232 allows full computer control. Also, the power supply can alternatively trigger with remote switches. We have designed these power providing workhorses as drop-in replacements for aging Ion Tech RF2000-series supplies. The I-Beam series has rugged output capabilities while using the same communications protocols and connectors, and can therefore keep older systems running.
RF Neutralizers
The RF neutralizer is placed downstream from the source. There, it emits electrons to balance the number of positive ions which leave the source. The RFN operates in a similar fashion to the source. It requires an inert process gas, has an RF antenna and its own matching network. Please refer to its manual for a detailed description of its operation and additional information.
The RFN needs to be placed so that its electrons can couple (or “see”) the ion beam. It is very important that these electrons have a close (about 150 mm), unobstructed path to the beam to ensure stable, noise free operation. The RF neutralizer should also be located away from strong magnetic fields. A common challenge will be to protect the RFN from process material that can coat its keeper - but allow for electrons to couple.
Hardware Solutions
We carry a wide range of ion beam hardware and spare parts for your source. With proper operation including source cooldown, you can expect 6 to 12 months of operation before some parts need to be replaced. Common items, such as fasteners or insulators can last longer if properly cared for. We do carry many common items to keep your ion beam source properly operating. If you cannot find something here, please give us a call.